Correlation between conductivity and structural evolution of Si-rich silicon oxide films annealed at different temperatures
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› 2011
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Stegemann, Bert; Lussky, Thomas; Schöpke, Andreas; Čermák, Jan; Rezek, Bohuslav; Kočka, Jan; Schmidt, Manfred: Correlation between conductivity and structural evolution of Si-rich silicon oxide films annealed at different temperatures. In: Proceedings of the 23rd Workshop on Quantum Solar Energy Conversion - (QUANTSOL 2011) . Berlin: 2011, S. [2 pages].