Advanced liquid-free, piezoresistive, SOI-based pressure sensor concepts for measurements in harsh environments
Sammelbandbeitrag › Aufsatz
› 2014
Zitation
Sammelbandbeitrag
Ngo, Ha-Duong; Mukhopadhyay, Biswaijit; Ehrmann, Oswin; Lang, Klaus-Dieter: Advanced liquid-free, piezoresistive, SOI-based pressure sensor concepts for measurements in harsh environments . In: Microelectronic Packaging in the 21st century. Hg. von Aschenbrenner, Rolf; Schneider-Ramelow, Martin. Stuttgart: Fraunhofer Verlag 2014 S. 387-391.