Development of a Novel High Reliable Si-Based Trace Humidity Sensor Array for Aerospace and Process Industry
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Zhou, Shuyao; Dao, Q. C.; Mukhopadhyay, Biswajit; Mackowiak, Piotr; Ehrmann, Oswin; Lang, Klaus-Dieter; Woratz, Michael; Herrmann, Peter; Weiland, T.; Pohl, Olaf; Noack, Volker; Ngo, Ha Duong: Development of a Novel High Reliable Si-Based Trace Humidity Sensor Array for Aerospace and Process Industry. In: Sensors & Transducers Journal Vol. 207, Issue 12, December 2016. (2016), S. 30-35.