Improvement of the homogeneity of high mobility In2O3:H films by sputtering through a mesh electrode studied by Monte Carlo simulation and thin film analysis

Artikel › Journalartikel › 2016

Zitation

Scherg-Kurmes, Harald; Hafez, Ahmad; Siemers, Michael; Pflug, Andreas; Schlatmann, Rutger; Rech, Bernd; Szyszka, Bernd: Improvement of the homogeneity of high mobility In2O3:H films by sputtering through a mesh electrode studied by Monte Carlo simulation and thin film analysis. In: physica status solidi a Vol. 213, Issue 9. (2016), S. 2310–2316.

ISSN

1862-6319

Link

http://dx.doi.org/10.1002/pssa.201532819

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