In this collaborative project we aim to develop an integrated acousto-nanoelectromechanical system (NEMS) based on monolithic (Al,TM)N thin films. Here, gigahertz (GHz) surface acoustic waves (SAWs) excite vibrations in the membrane. The possibility to interface the SAW and the nanomechanical resonator on a monolithic platform poses a tremendous advantage. Within this collaboration we are capable of synthesizing the thin films using both molecular beam epitaxy (MBE) and sputtering, which enables us to build the inte- grated system and directly compare the quality factors resulting from the two growth methods. Our major goals are i) material study of new nitride compounds, in particular using Hf and Zr, gearing towards SAW generation, ii) building of the integrated system and study of acousto-NEMS as a phononic platform, in par- ticular at mK temperature, where it enters the quantum regime and iii) investigation of the mechanical trans- duction based on the system, oriented towards sensing application in harsh environment. The former has critical impact on quantum systems and the latter a prerequisite for the eventual commercialization of the new nitrides.

• Prof. Dr.-Ing. Ha Duong Ngo (Projektleitung)

DFG

• Leibniz Institut PDI
• Technische Universität München
• Universität Münster