Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong; Mackowiak, Piotr; Abdallah, Rachid; Wilke, Martin; Patel, Jash; Ashraf, Huma; Buchanan, Keith; Lang, Klaus-Dieter; Schneider-Ramelow, Martin: Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications. In: 51st International Symposium on Microelectronics, S. 1-7, iMAPS, Pasadena, USA, 2018