Silicon Micro Piezoresistive Pressure Sensors (Chapter 6)

Typ

Beitrag Sammelwerk von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong; Mackowiak, Piotr; Ehrmann, Oswin; Lang, Klaus-Dieter: Silicon Micro Piezoresistive Pressure Sensors (Chapter 6). In: IFSA Publishing, Physical Sensors, Sensor Networks and Remote Sensing, S. 161-184, Barcelona, 2018, ISBN 978-84-09-03028-6