Passivation of Liquid‐Phase Crystallized Silicon With PECVD‐SiNx and PECVD‐SiNx/SiOx

Typ

Beitrag Zeitschrift von Prof. Dr. Rutger Schlatmann

Zitation

Preissler, Natalie; Amkreutz, Daniel; Dulanto, Jorge; Töfflinger, Jan Amaru; Thi Trinh, Cham; Trahms, Martina; Abou‐Ras, Daniel; Kirmse, Holm; Weingärtner, Roland; Rech, Bernd; Schlatmann, Rutger: Passivation of Liquid‐Phase Crystallized Silicon With PECVD‐SiNx and PECVD‐SiNx/SiOx. In: phyisca status solidi (a), S. 1800239 (1-9), 2018, ISSN 0370-1972 (print), 1521-3951 (online)

Homepage

https://doi.org/10.1002/pssa.201800239