Improved electrical properties of pulsed DC magnetron sputtered hydrogen doped indium oxide after annealing in air

Typ

Beitrag Zeitschrift von Prof. Dr. Rutger Schlatmann

Zitation

Erfurt, Darja; Heinemann, Marc D.; Körner, Stefan; Szyszka, Bernd; Klenk, Reiner; Schlatmann, Rutger: Improved electrical properties of pulsed DC magnetron sputtered hydrogen doped indium oxide after annealing in air. In: Materials Science in Semiconductor Processing, S. 170-175, 2019, ISSN 1369-8001

Homepage

https://doi.org/10.1016/j.mssp.2018.09.012