Improved Surface Passivation by Wet Texturing, Ozone‐Based Cleaning, and Plasma‐Enhanced Chemical Vapor Deposition Processes for High‐Efficiency Silicon Heterojunction Solar Cells

Typ

Beitrag Zeitschrift von Prof. Dr. Rutger Schlatmann

Zitation

Morales-Vilches, Anna Belen; Wang, Er-Chien; Henschel, Tobias; Kubicki, Matthias; Cruz, Alexandros; Janke, Stefan; Korte, Lars; Schlatmann, Rutger; Stannowski, Bernd: Improved Surface Passivation by Wet Texturing, Ozone‐Based Cleaning, and Plasma‐Enhanced Chemical Vapor Deposition Processes for High‐Efficiency Silicon Heterojunction Solar Cells. In: physica status solidi (a), S. 1900518 (1-7), 2019, ISSN 1862-6319

Homepage

https://doi.org/10.1002/pssa.201900518