PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERING LAYER DEPOSITION) TECHNOLOGY

Konferenzbeitrag › Konferenzpaper › 2023

Zitation

Bickel, Jan; Gesche, Roland; Fieber, Martin; Scherer, Joachim; Kovacs, Reinhold; Hu, Xiaodong; Ngo, Ha Duong: PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERING LAYER DEPOSITION) TECHNOLOGY. In: Trasducers 2023. Kyoto, Japan: 2023, S. 1-4.

Link

https://doi.org/10.1002/tee.24044

Sprache

Englisch

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