The influence of substrate pre-treatment on the electronic properties of the Si/SiO2 interface of ultra-thin plasma-oxides

Typ

Beitrag Konferenzband von Prof. Dr. Bert Stegemann

Zitation

Malguth, Enno ; Gref, Orman ; Schöpke, Andreas ; Stegemann, Bert ; Schmidt, Manfred ; Angermann, Heike : The influence of substrate pre-treatment on the electronic properties of the Si/SiO2 interface of ultra-thin plasma-oxides. In: Proc. of International Conference Solid State Surfaces and Interfaces VII (SSSI-VII), S. pp. 49-50, Smolenice, Slovakia, 2010, ISBN 978-80-223-2938-5