Correlation between conductivity and structural evolution of Si-rich silicon oxide films annealed at different temperatures

Typ

Beitrag Konferenzband von Prof. Dr. Bert Stegemann

Zitation

Stegemann, Bert ; Lussky, Thomas ; Schöpke, Andreas ; Čermák, Jan ; Rezek, Bohuslav ; Kočka, Jan ; Schmidt, Manfred: Correlation between conductivity and structural evolution of Si-rich silicon oxide films annealed at different temperatures. In: Proceedings of the 23rd Workshop on Quantum Solar Energy Conversion - (QUANTSOL 2011) , S. [2 pages], Berlin, 2011

Homepage

http://www.quantsol.org/pub/pub11_26.pdf