Liquid-free SOI-based piezoresistive pressure sensor for measurement up to 400°C

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong: Liquid-free SOI-based piezoresistive pressure sensor for measurement up to 400°C, S. 100-114, Taichung, Taiwan, 2012