MEMS pressure sensor with maximum performances by using novel back-side direct-exposure concept featuring through glass vias

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong: MEMS pressure sensor with maximum performances by using novel back-side direct-exposure concept featuring through glass vias. In: Proceedings of SPIE 8763, Smart Sensors, Actuators, and MEMS VI, S. 6-11, SPIE, Grenoble, Frankreich, 2013, ISSN 0277-786X

Homepage

http://dx.doi.org/10.1117/12.2017159