Thermal Design of a Tristable Electromagnetic Linear Microactuator with High Displacement and Low Actuation Force for Mass Storage Applications

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong: Thermal Design of a Tristable Electromagnetic Linear Microactuator with High Displacement and Low Actuation Force for Mass Storage Applications. In: Proceedings of SPIE 8763, Smart Sensors, Actuators, and MEMS VI, S. 13-18, SPIE, Grenoble, Frankreich, 2013, ISSN 0277-786X

Homepage

http://dx.doi.org/10.1117/12.2017559