Conditioning of silicon substrates by wet-chemical etching and oxidation

Typ

Beitrag Konferenzband von Prof. Dr. Bert Stegemann

Zitation

Angermann, Heike ; Kegel, Jan ; Stürzebecher, Uta ; Grün, André ; Stegemann, Bert: Conditioning of silicon substrates by wet-chemical etching and oxidation. In: Proceedings of 8. International Conference Solid State Surfaces and Interfaces (SSSI-VIII) , S. 1-3, Smolenice, Slovakei, 2013, ISBN 978-80-223-3501-0