Advanced liquid-free, piezoresistive, SOI-based pressure sensor concepts for measurements in harsh environments

Typ

Beitrag Sammelwerk von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha-Duong; Mukhopadhyay, Biswaijit; Ehrmann, Oswin; Lang, Klaus-Dieter: Advanced liquid-free, piezoresistive, SOI-based pressure sensor concepts for measurements in harsh environments . In: Aschenbrenner, Rolf; Schneider-Ramelow, Martin, Microelectronic Packaging in the 21st century, S. 387-391, Fraunhofer Verlag, Stuttgart, 2014, ISBN 978-3-8396-0826-5