Advanced Liquid-Free, Piezoresistive, SOI-Based Pressure Sensors for Measurements in Harsh Environments

Typ

Beitrag Zeitschrift von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong; Mukhopadhyay, Biswaijit; Ehrmann, Oswin; Lang, Klaus-Dieter: Advanced Liquid-Free, Piezoresistive, SOI-Based Pressure Sensors for Measurements in Harsh Environments. In: Sensors 2015, S. 20305-20315, 2015, ISSN 1424-8220

Homepage

http://www.mdpi.com/1424-8220/15/8/20305/html