WSi-WSiN-Pt metallization scheme for Silicon Carbide Based high temperature Microsystems

Typ

Beitrag Zeitschrift von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong; Mukhopadhyay, Biswaijit; Mackowiak, Piotr; Kröhnert, Kevin; Ehrmann, Oswin; Lang, Klaus-Dieter: WSi-WSiN-Pt metallization scheme for Silicon Carbide Based high temperature Microsystems. In: Journal os Micromachines, S. 1-9, 2016, ISSN 2072-666X