Development of a Novel High Reliable Si-Based Trace Humidity Sensor Array for Aerospace and Process Industry

Typ

Beitrag Zeitschrift von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Zhou, Shuyao; Dao, Q. C.; Mukhopadhyay, Biswajit; Mackowiak, Piotr; Ehrmann, Oswin; Lang, Klaus-Dieter; Woratz, Michael; Herrmann, Peter; Weiland, T.; Pohl, Olaf; Noack, Volker; Ngo, Ha Duong: Development of a Novel High Reliable Si-Based Trace Humidity Sensor Array for Aerospace and Process Industry. In: Sensors & Transducers Journal, S. 30-35, 2016, ISSN 2306-8515