Investigation of DRIE etching performance on signal quality of a SOI based pressure sensors for harsh environments

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong; Mackowiak, Piotr; Meinecke, Fabian; Mukhopadhyay, Biswajit; Hoang, Thanh Hai; Dao, Quoc-Cuong; Ehrmann, Oswin; Lang, Klaus-Dieter: Investigation of DRIE etching performance on signal quality of a SOI based pressure sensors for harsh environments. In: Proceedings AMA Conferences 2015 – SENSOR 2015 and IRS2 2015, S. 570-574, MDPI - Multidisciplinary Digital Publishing Institute AG, Basel, 2015, ISBN 978-3-9813484-8-4

Homepage

http://www.ama-science.org/ama-conferences/ama-conferences-from-19-21-may-2015/program/sensor-2015/