Plasma Enhanced Atomic Layer Deposition by means of an Anode Layer Ion Source for Electronics Packaging Applications

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong; Bellido-Gonzalez, Victor; Monaghan, D.; Daniel, B.; Li, H.; Papa, F.; Kroehnert, K.; Ehrmann, Oswin; Lang, Klaus-Dieter; Mackowiak, Piotr: Plasma Enhanced Atomic Layer Deposition by means of an Anode Layer Ion Source for Electronics Packaging Applications. In: Proceedings of the 17th Electronics Packaging Technology Conference, S. 204-208, Singapur, 2015, ISBN 978-1-4673-7268-8