Plasma Enhanced Atomic Layer Deposition by means of an Anode Layer Ion Source for Electronics Packaging Applications
Typ
Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo
Zitation
Ngo, Ha Duong ; Bellido-Gonzalez, Victor ; Monaghan, D. ; Daniel, B. ; Li, H. ; Papa, F. ; Kroehnert, K. ; Ehrmann, Oswin ; Lang, Klaus-Dieter ; Mackowiak, Piotr: Plasma Enhanced Atomic Layer Deposition by means of an Anode Layer Ion Source for Electronics Packaging Applications. In: Proceedings of the 17th Electronics Packaging Technology Conference, S. 204-208, Singapur, 2015, ISBN 978-1-4673-7268-8