SOI-based, High Reliable Pressure Sensor with Floating Concept for High Temperature Applications

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha-Duong; Giuliani, Andrea; Drera, Lionello; Arancio, Domenico; Mukhopadhyay, Biswaijit: SOI-based, High Reliable Pressure Sensor with Floating Concept for High Temperature Applications. In: Procedia Engineering, S. 720–723, Brescia, Italien, 2014, ISSN 1877-7058

Homepage

http://dx.doi.org/10.1016/j.proeng.2014.11.639