HIpIms in full face erosion Circular Cathode for semiconductor Application. Best Paper Award Interactive

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Papa, F.; Li, H.; Azzopardi, A.; Brindley, J.; Vetushka, A.; Bellido-Gonzalez, Victor; Fernandez, I.; Wennberg, A.; Ngo, Ha Duong: HIpIms in full face erosion Circular Cathode for semiconductor Application. Best Paper Award Interactive, S. 200-204, Braunschweig, 2015, ISBN -, ISSN -