The Roadmap for Develop of Piezoresistive Micro Mechanical Sensors for Harsh Environment Applications

Typ

Beitrag Konferenzband von Prof. Dr.-Ing. Ha Duong Ngo

Zitation

Ngo, Ha Duong; Mackowiack, Piotr; Grabbert, Niels; Weiland, Thomas; Hu, Xiaodong; Schneider-Ramelow, Martin; Ehrmann, Oswin; Lang, Klaus-Dieter: The Roadmap for Develop of Piezoresistive Micro Mechanical Sensors for Harsh Environment Applications. In: Conference Proceeding ICST 2017, S. 100-105, Sydney, 2017, ISBN 978-1-5090-6526-4