A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications

Konferenzbeitrag › Konferenzpaper › 2022

Zitation

Ngo, Ha Duong; Kolja Erbacher, Lixiang Wu, Bei Wang, Zirui Pang, Julien Weiss, Pablo Acedo: A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications. In: A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications. Prague: IEEE 2022, S. 1-5.

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