SILICON CARBIDE ON INSULATOR (SiCOI) MATERIALS FOR MEMS AND QUANTUM APPLICATIONS USING WAFER BONDING METHODS
Konferenzbeitrag › Konferenzpaper
› 2025
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Konferenzbeitrag Full Paper
Ngo, Ha Duong; Wang, Bei; Weiland, Thomas; Pohl, Olaf; Naydenov, Boris; Nguyen, Tien Son: SILICON CARBIDE ON INSULATOR (SiCOI) MATERIALS FOR MEMS AND QUANTUM APPLICATIONS USING WAFER BONDING METHODS. In: The 37th European Conference on Solid-State Transducers EUROSENSORS 2025. Hg. von EUROSENSORS. Breslau: 2025, S. 1-4.