Conditioning of silicon substrates by wet-chemical etching and oxidation
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› 2013
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Konferenzbeitrag Full Paper
Angermann, Heike; Kegel, Jan; Stürzebecher, Uta; Grün, André; Stegemann, Bert: Conditioning of silicon substrates by wet-chemical etching and oxidation. In: Proceedings of 8. International Conference Solid State Surfaces and Interfaces (SSSI-VIII) . Hg. von Brunner, R.. Smolenice, Slovakei: 2013, S. 1-3.