A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications

Konferenzbeitrag › Konferenzpaper › 2022

Zitation

Ngo, Ha Duong; Kolja Erbacher, Lixiang Wu, Bei Wang, Zirui Pang, Julien Weiss, Pablo Acedo: A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications. In: 2022 International Conference on Electrical, Computer and Energy Technologies (ICECET), Prague, Czech Republic. Prague: IEEE 2022, S. 1-5.

DOI / URN

10.1109/ICECET55527.2022.9872990

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BibTeX / RIS