Passivation of Liquid‐Phase Crystallized Silicon With PECVD‐SiNx and PECVD‐SiNx/SiOx

Artikel › Journalartikel › 2018

Zitation

Preissler, Natalie; Amkreutz, Daniel; Dulanto, Jorge; Töfflinger, Jan Amaru; Thi Trinh, Cham; Trahms, Martina; Abou‐Ras, Daniel; Kirmse, Holm; Weingärtner, Roland; Rech, Bernd; Schlatmann, Rutger: Passivation of Liquid‐Phase Crystallized Silicon With PECVD‐SiNx and PECVD‐SiNx/SiOx. In: phyisca status solidi (a) 215(14)2018. (2018), S. 1800239 (1-9).

ISSN

0370-1972 (print), 1521-3951 (online)

Link

https://doi.org/10.1002/pssa.201800239

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