Improved electrical properties of pulsed DC magnetron sputtered hydrogen doped indium oxide after annealing in air

Artikel › Journalartikel › 2019

Zitation

Erfurt, Darja; Heinemann, Marc D.; Körner, Stefan; Szyszka, Bernd; Klenk, Reiner; Schlatmann, Rutger: Improved electrical properties of pulsed DC magnetron sputtered hydrogen doped indium oxide after annealing in air. In: Materials Science in Semiconductor Processing Vol. 89. (2019), S. 170-175.

ISSN

1369-8001

Link

https://doi.org/10.1016/j.mssp.2018.09.012

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