Improved Surface Passivation by Wet Texturing, Ozone‐Based Cleaning, and Plasma‐Enhanced Chemical Vapor Deposition Processes for High‐Efficiency Silicon Heterojunction Solar Cells
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› 2020
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Morales-Vilches, Anna Belen; Wang, Er-Chien; Henschel, Tobias; Kubicki, Matthias; Cruz, Alexandros; Janke, Stefan; Korte, Lars; Schlatmann, Rutger; Stannowski, Bernd: Improved Surface Passivation by Wet Texturing, Ozone‐Based Cleaning, and Plasma‐Enhanced Chemical Vapor Deposition Processes for High‐Efficiency Silicon Heterojunction Solar Cells. In: Physica Status Solidi A 217, 4. (2020), S. 1-7 (1900518).