Dual-frequency piezoelectric MEMS microphones based on AlSc30%N thin films for aeroacoustic measurements
Artikel › Journalartikel
› 2023
Zitation
Artikel
Ngo, Ha Duong; Wu, Lixiang; Yanfen, Zhai; Onteru, Lokesh: Dual-frequency piezoelectric MEMS microphones based on AlSc30%N thin films for aeroacoustic measurements. In: 2023 AIAA Aviation . (2023), S. 1-7.