PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERING LAYER DEPOSITION) TECHNOLOGY
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› 2024
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Artikel
Bickel, Jan; Ngo, Ha Duong: PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERING LAYER DEPOSITION) TECHNOLOGY. In: IEEJ Transactions on Electrical and Electronic Engineering 2024. (2024), S. 1-5.