PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERING LAYER DEPOSITION) TECHNOLOGY

Artikel › Journalartikel › 2024

Zitation

Bickel, Jan; Ngo, Ha Duong: PLASMA-BASED ADDITIVE MANUFACTURING METHOD FOR MEMS USING APSLD (ATMOSPHERIC PRESSURE SPUTTERING LAYER DEPOSITION) TECHNOLOGY. In: IEEJ Transactions on Electrical and Electronic Engineering 2024. (2024), S. 1-5.

ISSN

1931-4981, 1931-4973

ISBN

1931-4981

DOI / URN

https://doi.org/10.1002/tee.24044

Link

https://doi.org/10.1002/tee.24044

Sprache

Englisch

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BibTeX / RIS