Oxidation of Si surfaces: Effect of ambient air and water treatments on surface charge and interface state density

Veranstaltungsbeitrag › Posterpräsentation › 2016

Veranstaltung

Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS)
Knokke, Belgium, 11.09.2016 - 14.09.2016

Ergänzende Angaben

Poster ( Heike Angermann, Patrice Balamou, Wenjia Lu, Lars Korte, Caspar Leendertz, Bert Stegemann)

Homepage

http://www.ucpss.org/